Publication:

Investigation of light-induced deep-level defect activation at the AlN/Si interface

Date

2011
Journal article
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dc.contributor.authorVisalli, Domenica
dc.contributor.authorVan Hove, Marleen
dc.contributor.authorLeys, Maarten
dc.contributor.authorDerluyn, Joff
dc.contributor.authorSimoen, Eddy
dc.contributor.authorSrivastava, Puneet
dc.contributor.authorGeens, Karen
dc.contributor.authorDegroote, Stefan
dc.contributor.authorGermain, Marianne
dc.contributor.authorNguyen, Anh Phuc Duc
dc.contributor.authorStesmans, Andre
dc.contributor.authorBorghs, Gustaaf
dc.contributor.imecauthorSimoen, Eddy
dc.contributor.imecauthorGeens, Karen
dc.contributor.imecauthorStesmans, Andre
dc.contributor.imecauthorBorghs, Gustaaf
dc.contributor.orcidimecSimoen, Eddy::0000-0002-5218-4046
dc.contributor.orcidimecGeens, Karen::0000-0003-1815-3972
dc.date.accessioned2021-10-19T21:23:48Z
dc.date.available2021-10-19T21:23:48Z
dc.date.embargo9999-12-31
dc.date.issued2011
dc.identifier.issn1882-0778
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20100
dc.source.beginpage94101
dc.source.issue9
dc.source.journalApplied Physics Express
dc.source.volume4
dc.title

Investigation of light-induced deep-level defect activation at the AlN/Si interface

dc.typeJournal article
dspace.entity.typePublication
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