Optimization of low-temperature silicon nitride processes for improvement of device performance

Publication:

2005

Journal article

Author(s)

;

;

Shi, Xiaoping

;

Kunnen, Eddy

;

Degroote, Bart

;

;

;

Augendre, Emmanuel

Microelectronics Reliability

1909 since deposited on 2021-10-16

Acq. date: 2026-06-12