Publication:
Reliability performance of advanced metallization options for 30nm ½ pitch in SiCOH low-k materials
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1905 since deposited on 2021-10-19
2last month
Acq. date: 2026-10-13
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Views
1905 since deposited on 2021-10-19
2last month
Acq. date: 2026-10-13
Citations