Publication:

Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories

Date

2021
Journal article
https://doi.org/10.3390/mi12091084
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Published version 9.27 MB

Author(s)

Ramesh, Siva  
;
Ajaykumar, Arjun  
;
Ragnarsson, Lars-Ake  
;
Breuil, Laurent  
;
El Hajjam, Gabriel Khalil
;
Kaczer, Ben  
;
Belmonte, Attilio  
;
Nyns, Laura  
;
Soulie, Jean-Philippe  
;
Van den Bosch, Geert  
;
Rosmeulen, Maarten  

Journal

MICROMACHINES

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138 since deposited on 2023-06-20
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1207 since deposited on 2023-06-20
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Acq. date: 2026-01-08

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