Publication:

Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories

Date

2021
Journal article
https://doi.org/10.3390/mi12091084
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dc.contributor.authorRamesh, Siva
dc.contributor.authorAjaykumar, Arjun
dc.contributor.authorRagnarsson, Lars-Ake
dc.contributor.authorBreuil, Laurent
dc.contributor.authorEl Hajjam, Gabriel Khalil
dc.contributor.authorKaczer, Ben
dc.contributor.authorBelmonte, Attilio
dc.contributor.authorNyns, Laura
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorRosmeulen, Maarten
dc.contributor.imecauthorRamesh, Siva
dc.contributor.imecauthorAjaykumar, Arjun
dc.contributor.imecauthorRagnarsson, Lars-Ake
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorEl Hajjam, Gabriel Khalil
dc.contributor.imecauthorKaczer, Ben
dc.contributor.imecauthorBelmonte, Attilio
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorvan den Bosch, Geert
dc.contributor.imecauthorRosmeulen, Maarten
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.contributor.orcidimecBelmonte, Attilio::0000-0002-3947-1948
dc.contributor.orcidimecvan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRagnarsson, Lars-Ake::0000-0003-1057-8140
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecRosmeulen, Maarten::0000-0002-3663-7439
dc.contributor.orcidimecRamesh, Siva::0000-0002-8473-7258
dc.date.accessioned2023-08-04T07:55:30Z
dc.date.available2023-06-20T10:37:17Z
dc.date.available2023-08-04T07:55:30Z
dc.date.embargo2021-09-08
dc.date.issued2021
dc.identifier.doi10.3390/mi12091084
dc.identifier.issn2072-666X
dc.identifier.pmidMEDLINE:34577727
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/41972
dc.publisherMDPI
dc.source.beginpageArt. 1084
dc.source.endpagena
dc.source.issue9
dc.source.journalMICROMACHINES
dc.source.numberofpages15
dc.source.volume12
dc.subject.keywordsHIGH-KAPPA DIELECTRICS
dc.subject.keywordsFUNCTION EXTRACTION
dc.subject.keywordsLEVEL
dc.subject.keywordsCAPACITANCE
dc.title

Understanding the Origin of Metal Gate Work Function Shift and Its Impact on Erase Performance in 3D NAND Flash Memories

dc.typeJournal article
dspace.entity.typePublication
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