Publication:
Patterning challenges for direct metal etch of ruthenium and molybdenum at 32 nm metal pitch and below
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571 since deposited on 2022-05-22
72last month
14last week
Acq. date: 2026-08-06
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1889 since deposited on 2022-05-22
4last month
1last week
Acq. date: 2026-08-06
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