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Characterization of ultra-thin nickel-silicide films synthesized using the solid state reaction of Ni with an underlying Si:P substrate (P: 0.7 to 4.0%)
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Characterization of ultra-thin nickel-silicide films synthesized using the solid state reaction of Ni with an underlying Si:P substrate (P: 0.7 to 4.0%)
Date
2016
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Peter, Antony
;
Yu, Hao
;
Dutta, Shibesh
;
Rosseel, Erik
;
Van Elshocht, Sven
;
Paulussen, Kris
;
Moussa, Alain
;
Vaesen, Inge
;
Schaekers, Marc
Journal
Microelectronic Engineering
Abstract
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1907
since deposited on 2021-10-23
424
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Acq. date: 2025-10-24
Citations
Metrics
Views
1907
since deposited on 2021-10-23
424
item.page.metrics.field.last-week
Acq. date: 2025-10-24
Citations