Publication:

Characterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on Ge

Date

2005
Meeting abstract
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dc.contributor.authorHoussa, Michel
dc.contributor.authorConard, Thierry
dc.contributor.authorVan Steenbergen, Jan
dc.contributor.authorMavrou, G.
dc.contributor.authorPanayiotatos, Y.
dc.contributor.authordimoulas, A.
dc.contributor.authorMeuris, Marc
dc.contributor.authorCaymax, Matty
dc.contributor.authorHeyns, Marc
dc.contributor.imecauthorHoussa, Michel
dc.contributor.imecauthorConard, Thierry
dc.contributor.imecauthorVan Steenbergen, Jan
dc.contributor.imecauthorMeuris, Marc
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorHeyns, Marc
dc.contributor.orcidimecHoussa, Michel::0000-0003-1844-3515
dc.contributor.orcidimecConard, Thierry::0000-0002-4298-5851
dc.contributor.orcidimecMeuris, Marc::0000-0002-9580-6810
dc.date.accessioned2021-10-16T02:10:56Z
dc.date.available2021-10-16T02:10:56Z
dc.date.issued2005
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/10614
dc.source.conferenceMeeting Abstracts 208th ECS Meeting
dc.source.conferencedate16/10/2005
dc.source.conferencelocationLos Angeles, CA USA
dc.title

Characterization of atomic-beam deposited GeO1-xNx/HfO2 stacks on Ge

dc.typeMeeting abstract
dspace.entity.typePublication
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