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Impact of the Ge content and the epitaxial thickness on the bandgap shrinkage induced leakage current of recessed Si1-xGex source/drain junctions
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1955 since deposited on 2021-10-16
Acq. date: 2025-10-23
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1955 since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations