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Impact of the Ge content and the epitaxial thickness on the bandgap shrinkage induced leakage current of recessed Si1-xGex source/drain junctions

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1959 since deposited on 2021-10-16
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Acq. date: 2026-01-26

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1959 since deposited on 2021-10-16
2last month
1last week
Acq. date: 2026-01-26

Citations