Publication:
Comparative growth kinetics of SiGe in a commercial reduced pressure chemical vapour deposition EPI reactor and anomalies during growth of thin Si layers on SiGe
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1924 since deposited on 2021-09-30
1last month
Acq. date: 2025-12-08
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Metrics
Views
1924 since deposited on 2021-09-30
1last month
Acq. date: 2025-12-08
Citations