Publication:

Cu pumping in TSVs: Effect of pre-CMP thermal budget

Date

2011

Journal article

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Author(s)

De Wolf, Ingrid

;

;

Varela Pedreira, Olalla

;

;

Redolfi, Augusto

;

Van De Peer, Myriam

;

Vanstreels, Kris

;

Okoro, Chukwudi

;

Vandevelde, Bart

;

Journal

Microelectronics Reliability

Statistics

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