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Source/drain junction integration issues in submicron Ge MOSFETs
Publication:
Source/drain junction integration issues in submicron Ge MOSFETs
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Date
2008
Proceedings Paper
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16615.pdf
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Simoen, Eddy
;
Satta, Alessandra
;
Eneman, Geert
;
Brunco, David
;
De Jaeger, Brice
;
Opsomer, Karl
;
Meuris, Marc
;
Claeys, Cor
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1801
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Acq. date: 2025-12-15
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Views
1801
since deposited on 2021-10-17
1
last month
Acq. date: 2025-12-15
Citations