Publication:

Low-damage damascene patterning of SiOC(H) low-k dielectrics

Date

2005-06

Proceedings Paper

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Author(s)

Struyf, Herbert

;

Hendrickx, Dirk

;

;

Iacopi, Francesca

;

Richard, Olivier

;

Travaly, Youssef

;

Van Hove, Marleen

;

Boullart, Werner

;

Vanhaelemeersch, Serge

Statistics

1925 since deposited on 2021-10-16

Acq. date: 2026-02-26