Publication:

Patterning challenges for ultimate CMOS and beyond CMOS nano-fabrication

Date

2017

Proceedings Paper

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Author(s)

de Marneffe, Jean-Francois

;

Altamirano Sanchez, Efrain

;

Lazzarino, Frederic

;

Metrics

1892 since deposited on 2021-10-24

Acq. date: 2025-12-15