Publication:
Patterning challenges for ultimate CMOS and beyond CMOS nano-fabrication
Date
| dc.contributor.author | de Marneffe, Jean-Francois | |
| dc.contributor.author | Altamirano Sanchez, Efrain | |
| dc.contributor.author | Lazzarino, Frederic | |
| dc.contributor.author | Piumi, Daniele | |
| dc.contributor.imecauthor | de Marneffe, Jean-Francois | |
| dc.contributor.imecauthor | Altamirano Sanchez, Efrain | |
| dc.contributor.imecauthor | Lazzarino, Frederic | |
| dc.contributor.imecauthor | Piumi, Daniele | |
| dc.contributor.orcidimec | Lazzarino, Frederic::0000-0001-7961-9727 | |
| dc.date.accessioned | 2021-10-24T03:49:51Z | |
| dc.date.available | 2021-10-24T03:49:51Z | |
| dc.date.issued | 2017 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/28131 | |
| dc.identifier.url | http://iplasmanano.org/ | |
| dc.source.conference | iPlasmaNano-VIII | |
| dc.source.conferencedate | 2/07/2017 | |
| dc.source.conferencelocation | Antwerpen Belgium | |
| dc.title | Patterning challenges for ultimate CMOS and beyond CMOS nano-fabrication | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
| Files | ||
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