Publication:

Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology

Date

2024
Journal article
https://doi.org/10.1016/j.sse.2024.108929
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Author(s)

Franco, Jacopo  
;
Arimura, Hiroaki  
;
Brus, Stephan  
;
Dentoni Litta, Eugenio  
;
Croes, Kristof  
;
Horiguchi, Naoto  
;
Kaczer, Ben  

Journal

SOLID-STATE ELECTRONICS

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53 since deposited on 2024-05-24
31last month
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571 since deposited on 2024-05-24
9last month
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Acq. date: 2026-08-24

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