Publication:

Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology

Date

2024
Journal article
https://doi.org/10.1016/j.sse.2024.108929
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dc.contributor.authorFranco, Jacopo
dc.contributor.authorArimura, Hiroaki
dc.contributor.authorBrus, Stephan
dc.contributor.authorDentoni Litta, Eugenio
dc.contributor.authorCroes, Kristof
dc.contributor.authorHoriguchi, Naoto
dc.contributor.authorKaczer, Ben
dc.contributor.imecauthorFranco, Jacopo
dc.contributor.imecauthorArimura, Hiroaki
dc.contributor.imecauthorBrus, Stephan
dc.contributor.imecauthorDentoni Litta, Eugenio
dc.contributor.imecauthorCroes, Kristof
dc.contributor.imecauthorHoriguchi, Naoto
dc.contributor.imecauthorKaczer, Ben
dc.contributor.orcidimecFranco, Jacopo::0000-0002-7382-8605
dc.contributor.orcidimecArimura, Hiroaki::0000-0002-3138-708X
dc.contributor.orcidimecBrus, Stephan::0000-0003-3554-0640
dc.contributor.orcidimecDentoni Litta, Eugenio::0000-0003-0333-376X
dc.contributor.orcidimecCroes, Kristof::0000-0002-3955-0638
dc.contributor.orcidimecHoriguchi, Naoto::0000-0001-5490-0416
dc.contributor.orcidimecKaczer, Ben::0000-0002-1484-4007
dc.date.accessioned2025-01-13T12:42:28Z
dc.date.available2024-05-24T17:30:06Z
dc.date.available2025-01-13T12:42:28Z
dc.date.embargo2026-03-30
dc.date.issued2024
dc.identifier.doi10.1016/j.sse.2024.108929
dc.identifier.issn0038-1101
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43965
dc.publisherPERGAMON-ELSEVIER SCIENCE LTD
dc.source.beginpageArt. 108929
dc.source.endpageN/A
dc.source.issueJune
dc.source.journalSOLID-STATE ELECTRONICS
dc.source.numberofpages5
dc.source.volume216
dc.title

Impact of work function metal stacks on the performance and reliability of multi-Vth RMG CMOS technology

dc.typeJournal article
dspace.entity.typePublication
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