Standard cell design in N7: EUV vs. immersion

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Author(s)

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Sherazi, Yasser

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Trivkovic, Darko

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Gillijns, Werner

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Debacker, Peter

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Raghavan, Praveen

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Mercha, Abdelkarim

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Ryckaert, Julien

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Verkest, Diederik

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1884 since deposited on 2021-10-22

Acq. date: 2025-10-24