Publication:

Standard cell design in N7: EUV vs. immersion

Date

2015

Proceedings Paper

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Files

31086.pdf 1.1 MB

Author(s)

;

;

Sherazi, Yasser

;

Trivkovic, Darko

;

Gillijns, Werner

;

Debacker, Peter

;

Raghavan, Praveen

;

;

;

Mercha, Abdelkarim

;

Ryckaert, Julien

;

Verkest, Diederik

Metrics

1894 since deposited on 2021-10-22

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Acq. date: 2026-01-10