Publication:

Standard cell design in N7: EUV vs. immersion

Date

2015
Proceedings Paper
Simple item page Full metadata Statistics
 
dc.contributor.authorChava, Bharani
dc.contributor.authorRio, David
dc.contributor.authorSherazi, Yasser
dc.contributor.authorTrivkovic, Darko
dc.contributor.authorGillijns, Werner
dc.contributor.authorDebacker, Peter
dc.contributor.authorRaghavan, Praveen
dc.contributor.authorElsaid, Ahmad
dc.contributor.authorDusa, Mircea
dc.contributor.authorMercha, Abdelkarim
dc.contributor.authorRyckaert, Julien
dc.contributor.authorVerkest, Diederik
dc.contributor.imecauthorRio, David
dc.contributor.imecauthorSherazi, Yasser
dc.contributor.imecauthorTrivkovic, Darko
dc.contributor.imecauthorGillijns, Werner
dc.contributor.imecauthorDebacker, Peter
dc.contributor.imecauthorDusa, Mircea
dc.contributor.imecauthorMercha, Abdelkarim
dc.contributor.imecauthorRyckaert, Julien
dc.contributor.imecauthorVerkest, Diederik
dc.contributor.orcidimecGillijns, Werner::0000-0002-2430-7360
dc.contributor.orcidimecDebacker, Peter::0000-0003-3825-5554
dc.contributor.orcidimecMercha, Abdelkarim::0000-0002-2174-6958
dc.contributor.orcidimecVerkest, Diederik::0000-0001-6567-2746
dc.date.accessioned2021-10-22T18:38:44Z
dc.date.available2021-10-22T18:38:44Z
dc.date.embargo9999-12-31
dc.date.issued2015
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25052
dc.identifier.urlhttp://proceedings.spiedigitallibrary.org/proceeding.aspx?articleid=2210407
dc.source.beginpage94270E
dc.source.conferenceDesign-Process-Technology Co-Optimization for Manufacturability IV
dc.source.conferencedate22/02/2015
dc.source.conferencelocationSan Jose, CA USA
dc.title

Standard cell design in N7: EUV vs. immersion

dc.typeProceedings paper
dspace.entity.typePublication
Files

Original bundle

Name:
31086.pdf
Size:
1.1 MB
Format:
Adobe Portable Document Format
Download
Publication available in collections:
Conference contributions