Publication:

A new method to determine the internal pressure and leakage rate of MEMS packages

Date

2013

Proceedings Paper

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Author(s)

;

De Coster, Jeroen

;

;

;

Wevers, Martine

;

De Wolf, Ingrid

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1927 since deposited on 2021-10-21

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Acq. date: 2026-04-05