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A new method to determine the internal pressure and leakage rate of MEMS packages

Date

2013
Proceedings Paper
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dc.contributor.authorWang, Bo
dc.contributor.authorDe Coster, Jeroen
dc.contributor.authorWitvrouw, Ann
dc.contributor.authorSeveri, Simone
dc.contributor.authorWevers, Martine
dc.contributor.authorDe Wolf, Ingrid
dc.contributor.imecauthorWang, Bo
dc.contributor.imecauthorDe Coster, Jeroen
dc.contributor.imecauthorSeveri, Simone
dc.contributor.imecauthorDe Wolf, Ingrid
dc.contributor.orcidimecDe Wolf, Ingrid::0000-0003-3822-5953
dc.date.accessioned2021-10-21T14:25:32Z
dc.date.available2021-10-21T14:25:32Z
dc.date.issued2013
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/23372
dc.source.conference17th International Conference on Solid-State Sensors, Actuators and Microsystems - TRANSDUCERS
dc.source.conferencedate16/06/2013
dc.source.conferencelocationBarcelona Spain
dc.title

A new method to determine the internal pressure and leakage rate of MEMS packages

dc.typeProceedings paper
dspace.entity.typePublication
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