Publication:
Thickness dependent residual stress in sputtered AlN thin films
Date
Loading...
Journal
Abstract
Description
Statistics
Views
1926 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-01-26
Citations
Statistics
Views
1926 since deposited on 2021-10-20
1last month
1last week
Acq. date: 2026-01-26
Citations