Publication:
Thickness dependent residual stress in sputtered AlN thin films
Date
Loading...
Journal
Abstract
Description
Metrics
Views
1925 since deposited on 2021-10-20
Acq. date: 2025-12-10
Citations
Metrics
Views
1925 since deposited on 2021-10-20
Acq. date: 2025-12-10
Citations