Publication:

Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry

Date

2023
Journal article
https://doi.org/10.1016/j.nimb.2023.04.036
Simple item page Full metadata Statistics
Loading...
Thumbnail Image

Files

Published version 3.59 MB
Accepted version 1.1 MB

Author(s)

Claessens, Niels  
;
Delabie, Annelies  
;
Vantomme, Andre
;
Vandervorst, Wilfried  
;
Meersschaut, Johan  

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

Abstract

Description

Statistics

Downloads

596 since deposited on 2023-10-20
27last month
4last week
Acq. date: 2026-10-11

Views

1181 since deposited on 2023-10-20
2last month
Acq. date: 2026-10-11

Citations

Statistics

Downloads

596 since deposited on 2023-10-20
27last month
4last week
Acq. date: 2026-10-11

Views

1181 since deposited on 2023-10-20
2last month
Acq. date: 2026-10-11

Citations