Publication:

Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry

Date

2023
Journal article
https://doi.org/10.1016/j.nimb.2023.04.036
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Published version 3.59 MB
Accepted version 1.1 MB

Author(s)

Claessens, Niels  
;
Delabie, Annelies  
;
Vantomme, Andre
;
Vandervorst, Wilfried  
;
Meersschaut, Johan  

Journal

NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS

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