Publication:

Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry

Date

2023
Journal article
https://doi.org/10.1016/j.nimb.2023.04.036
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dc.contributor.authorClaessens, Niels
dc.contributor.authorDelabie, Annelies
dc.contributor.authorVantomme, Andre
dc.contributor.authorVandervorst, Wilfried
dc.contributor.authorMeersschaut, Johan
dc.contributor.imecauthorClaessens, Niels
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.imecauthorMeersschaut, Johan
dc.contributor.orcidextVantomme, Andre::0000-0001-9158-6534
dc.contributor.orcidimecClaessens, Niels::0000-0002-8863-9532
dc.contributor.orcidimecVandervorst, Wilfried::0000-0001-6218-6291
dc.contributor.orcidimecDelabie, Annelies::0000-0001-9739-7419
dc.contributor.orcidimecMeersschaut, Johan::0000-0003-2467-1784
dc.date.accessioned2023-10-20T10:19:41Z
dc.date.available2023-10-20T10:19:41Z
dc.date.embargo2024-01-31
dc.date.issued2023
dc.description.wosFundingText& nbsp;This work was supported by the European Union's Horizon 2020 research and innovation programme [grant number 824096 - RADIATE] and by the Research Foundation - Flanders (FWO) [grant number 1S45421N].
dc.identifier.doi10.1016/j.nimb.2023.04.036
dc.identifier.issn0168-583X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/42840
dc.publisherELSEVIER
dc.source.beginpage174
dc.source.endpage181
dc.source.issueJuly
dc.source.journalNUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH SECTION B-BEAM INTERACTIONS WITH MATERIALS AND ATOMS
dc.source.numberofpages8
dc.source.volume540
dc.subject.keywordsION-BEAM ANALYSIS
dc.subject.keywordsAREA-SELECTIVE DEPOSITION
dc.subject.keywordsCOMPUTER-SIMULATION
dc.subject.keywordsTHIN-FILMS
dc.subject.keywordsSPECTRA
dc.subject.keywordsRBS
dc.subject.keywordsNANOSTRUCTURES
dc.subject.keywordsSOFTWARE
dc.subject.keywordsPROGRAM
dc.subject.keywords3D
dc.title

Probing the spatial dimensions of nanoscale patterns with Rutherford backscattering spectrometry

dc.typeJournal article
dspace.entity.typePublication
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