Publication:

Materials issues of Ni fully silicided (FUSI) gates for CMOS applications

Date

2005-05

Proceedings Paper

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Author(s)

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Kmieciak, Malgorzata

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Demeurisse, Caroline

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Kottantharayil, Anil

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Veloso, Anabela

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Kubicek, Stefan

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Vrancken, Christa

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Biesemans, Serge

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1949 since deposited on 2021-10-16

Acq. date: 2026-03-18