Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays

dc.contributor.author	Ceyssens, Frederik
dc.contributor.author	Welkenhuysen, Marleen
dc.contributor.author	Puers, Bob
dc.contributor.imecauthor	Ceyssens, Frederik
dc.contributor.imecauthor	Welkenhuysen, Marleen
dc.contributor.imecauthor	Puers, Bob
dc.contributor.orcidimec	Welkenhuysen, Marleen::0000-0001-6729-9391
dc.date.accessioned	2021-10-27T07:55:48Z
dc.date.available	2021-10-27T07:55:48Z
dc.date.issued	2019
dc.identifier.issn	0960-1317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/32675
dc.identifier.url	https://doi.org/10.1088/1361-6439/aaf43a
dc.source.beginpage	27001
dc.source.issue	2
dc.source.journal	Journal of Micromechanics and Microengineering
dc.source.volume	29
dc.title	Anisotropic etching in (3 1 1) Si to fabricate sharp resorbable polymer microneedles carrying neural electrode arrays
dc.type	Journal article
dspace.entity.type	Publication
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