Publication:
CMOS Device Scaling by Nanosheet Channel Architectures and New Channel Materials
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Acq. date: 2026-06-26
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3273 since deposited on 2023-08-24
Acq. date: 2026-06-26
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1121 since deposited on 2023-08-24
Acq. date: 2026-06-26
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