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Influence of extreme thinning on 130nm CMOS devices for 3D integration
Publication:
Influence of extreme thinning on 130nm CMOS devices for 3D integration
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Date
2008
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Munck, Koen
;
Chiarella, Thomas
;
De Moor, Piet
;
Swinnen, Bart
;
Van Hoof, Chris
Journal
IEEE Electron Device Letters
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1799
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations
Metrics
Views
1799
since deposited on 2021-10-17
Acq. date: 2025-12-15
Citations