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Effect of Al-content and post deposition annealing on the electrical properties of ultra-thin HfAlxOy layers
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1988 since deposited on 2021-10-15
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Acq. date: 2025-12-08
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1988 since deposited on 2021-10-15
1last month
1last week
Acq. date: 2025-12-08
Citations