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Detection of failure sites by focused ion beam and nano-probing in the interconnect of three-dimensional stacked circuit structures
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1910 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-10
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Metrics
Views
1910 since deposited on 2021-10-17
1last month
Acq. date: 2025-12-10
Citations