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Gate-All-Around nanosheet field-effect transistors for advanced logic and memory applications: integration and device features

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1951 since deposited on 2021-10-29
3last month
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Acq. date: 2026-03-16

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1951 since deposited on 2021-10-29
3last month
1last week
Acq. date: 2026-03-16

Citations