Publication:
Characterization of highly doped Si:P, Si:As and Si:P:As epi layers for source/drain epitaxy
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1 since deposited on 2021-10-27
Acq. date: 2025-10-28
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1985 since deposited on 2021-10-27
Acq. date: 2025-10-28
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Downloads
1 since deposited on 2021-10-27
Acq. date: 2025-10-28
Views
1985 since deposited on 2021-10-27
Acq. date: 2025-10-28
Citations