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Opportunities and challenges in APT metrology for semiconductor applications
Publication:
Opportunities and challenges in APT metrology for semiconductor applications
Date
2019
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Fleischmann, Claudia
;
Cuduvally, Ramya
;
Morris, Richard
;
Melkonyan, Davit
;
Op de Beeck, Jonathan
;
Makhotkin, Igor
;
van der Heide, Paul
;
Vandervorst, Wilfried
Journal
Microscopy and Microanalysis
Abstract
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1928
since deposited on 2021-10-27
403
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations
Metrics
Views
1928
since deposited on 2021-10-27
403
item.page.metrics.field.last-week
Acq. date: 2025-10-25
Citations