Publication:
Mechanism of k-value reduction of PECVD Low-k films treated with He/H2 ash plasma
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1839 since deposited on 2021-10-18
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Acq. date: 2026-01-08
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Views
1839 since deposited on 2021-10-18
2last month
2last week
Acq. date: 2026-01-08
Citations