Mechanism of k-value reduction of PECVD Low-k films treated with He/H2 ash plasma

Publication:

2010

Meeting abstract

Author(s)

Urbanowicz, Adam

;

Cremel, Maxime

;

;

Shamiryan, Denis

;

;

Baklanov, Mikhaïl

1843 since deposited on 2021-10-18

Acq. date: 2026-09-16