Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Conference contributions
Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
Publication:
Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
Copy permalink
Date
2004
Proceedings Paper
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rottenberg, Xavier
;
Nauwelaers, Bart
;
De Raedt, Walter
;
Tilmans, Harrie
Journal
Abstract
Description
Statistics
Views
1844
since deposited on 2021-10-15
Acq. date: 2026-10-13
Citations
Statistics
Views
1844
since deposited on 2021-10-15
Acq. date: 2026-10-13
Citations