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Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
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Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
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Date
2004-07
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Rottenberg, Xavier
;
Nauwelaers, Bart
;
De Raedt, Walter
;
Tilmans, Harrie
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1840
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations
Metrics
Views
1840
since deposited on 2021-10-15
Acq. date: 2025-12-15
Citations