Publication:
Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices
Date
| dc.contributor.author | Rottenberg, Xavier | |
| dc.contributor.author | Nauwelaers, Bart | |
| dc.contributor.author | De Raedt, Walter | |
| dc.contributor.author | Tilmans, Harrie | |
| dc.contributor.imecauthor | Rottenberg, Xavier | |
| dc.contributor.imecauthor | Nauwelaers, Bart | |
| dc.contributor.imecauthor | De Raedt, Walter | |
| dc.contributor.imecauthor | Tilmans, Harrie | |
| dc.contributor.orcidimec | De Raedt, Walter::0000-0002-7117-7976 | |
| dc.contributor.orcidimec | Tilmans, Harrie::0000-0003-4240-4962 | |
| dc.date.accessioned | 2021-10-15T15:56:37Z | |
| dc.date.available | 2021-10-15T15:56:37Z | |
| dc.date.issued | 2004-07 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/9534 | |
| dc.source.beginpage | B11 | |
| dc.source.conference | 5th Workshop on MEMS for MillimeterWAVE Communications - MEMSWAVE | |
| dc.source.conferencedate | 30/06/2004 | |
| dc.source.conferencelocation | Uppsala Sweden | |
| dc.source.endpage | B14 | |
| dc.title | Novel 2D+ model for the impact of the dielectric charge distribution on the electrostatic actuation of RF MEMS devices | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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