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Gate oxide reliability: upcoming trends, challenges, and opportunities

 
dc.contributor.authorKaczer, Ben
dc.contributor.authorDegraeve, Robin
dc.contributor.authorFranco, Jacopo
dc.contributor.authorGrasser, T.
dc.contributor.authorRoussel, Philippe
dc.contributor.authorBury, Erik
dc.contributor.authorWeckx, Pieter
dc.contributor.authorVaisman Chasin, Adrian
dc.contributor.authorTyaginov, Stanislav
dc.contributor.authorVandemaele, Michiel
dc.contributor.authorGrill, Alexander
dc.contributor.authorO'Sullivan, Barry
dc.contributor.authorDiaz Fortuny, Javier
dc.contributor.authorSaraza Canflanca, Pablo
dc.contributor.authorWaltl, M.
dc.contributor.authorRinaudo, Pietro
dc.contributor.authorZhao, Ying
dc.contributor.authorKao, Ethan
dc.contributor.authorAsanovski, Ruben
dc.contributor.authorCatapano, Edoardo
dc.contributor.imecauthorKaczer, B.
dc.contributor.imecauthorDegraeve, R.
dc.contributor.imecauthorFranco, J.
dc.contributor.imecauthorRoussel, Ph J.
dc.contributor.imecauthorBury, E.
dc.contributor.imecauthorWeckx, P.
dc.contributor.imecauthorChasin, A.
dc.contributor.imecauthorTyaginov, S.
dc.contributor.imecauthorVanclemacle, M.
dc.contributor.imecauthorGrill, A.
dc.contributor.imecauthorO'Sullivan, B.
dc.contributor.imecauthorFortuny, J. Diaz
dc.contributor.imecauthorCanflanca, P. Saraza
dc.contributor.imecauthorRinaudo, P.
dc.contributor.imecauthorZhao, Y.
dc.contributor.imecauthorKao, E.
dc.contributor.imecauthorAsanovski, R.
dc.contributor.imecauthorCatapano, E.
dc.contributor.imecauthorBeckers, A.
dc.contributor.imecauthorVici, A.
dc.date.accessioned2024-10-27T16:53:00Z
dc.date.available2024-10-27T16:53:00Z
dc.date.issued2024
dc.identifier.doi10.1109/SNW63608.2024.10639245
dc.identifier.eisbn979-8-3503-9163-3
dc.identifier.isbn979-8-3503-9164-0
dc.identifier.issn2161-4636
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44693
dc.publisherIEEE
dc.source.beginpage3
dc.source.conferenceIEEE Silicon Nanoelectronics Workshop (SNW) / Symposium on VLSI Technology and Circuits
dc.source.conferencedate2024-06-15
dc.source.conferencelocationHonolulu
dc.source.endpage4
dc.source.numberofpages2
dc.title

Gate oxide reliability: upcoming trends, challenges, and opportunities

dc.typeProceedings paper
dspace.entity.typePublication
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