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Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applications

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dc.contributor.authorArreghini, Antonio
dc.contributor.authorSuhane, Amit
dc.contributor.authorVan den Bosch, Geert
dc.contributor.authorBreuil, Laurent
dc.contributor.authorDe Meyer, Kristin
dc.contributor.authorJurczak, Gosia
dc.contributor.authorVan Houdt, Jan
dc.contributor.imecauthorArreghini, Antonio
dc.contributor.imecauthorVan den Bosch, Geert
dc.contributor.imecauthorBreuil, Laurent
dc.contributor.imecauthorDe Meyer, Kristin
dc.contributor.imecauthorJurczak, Gosia
dc.contributor.imecauthorVan Houdt, Jan
dc.contributor.orcidimecArreghini, Antonio::0000-0002-7493-9681
dc.contributor.orcidimecVan den Bosch, Geert::0000-0001-9971-6954
dc.contributor.orcidimecBreuil, Laurent::0000-0003-2869-1651
dc.contributor.orcidimecVan Houdt, Jan::0000-0003-1381-6925
dc.date.accessioned2021-10-18T15:16:18Z
dc.date.available2021-10-18T15:16:18Z
dc.date.embargo9999-12-31
dc.date.issued2010
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/16670
dc.source.beginpage101
dc.source.conference11th International Conference on Ultimate Integration on Silicon - ULIS
dc.source.conferencedate17/03/2010
dc.source.conferencelocationGlasgow UK
dc.source.endpage104
dc.title

Investigation on the temperature dependence of the dielectric constant of high-k materials for non-volatile memory applications

dc.typeProceedings paper
dspace.entity.typePublication
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