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Extending the roadmap beyond 3nm through system scaling boosters: A case study on buried power rail and backside power delivery
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Acq. date: 2026-05-14
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Acq. date: 2026-05-14
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1 since deposited on 2021-10-27
Acq. date: 2026-05-14
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2252 since deposited on 2021-10-27
2last month
Acq. date: 2026-05-14
Citations