Publication:
Extending the roadmap beyond 3nm through system scaling boosters: A case study on buried power rail and backside power delivery
Date
Loading...
Files
Journal
Abstract
Description
Metrics
Downloads
1 since deposited on 2021-10-27
Acq. date: 2025-10-24
Views
2226 since deposited on 2021-10-27
Acq. date: 2025-10-24
Citations
Metrics
Downloads
1 since deposited on 2021-10-27
Acq. date: 2025-10-24
Views
2226 since deposited on 2021-10-27
Acq. date: 2025-10-24
Citations