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Alignment and averaging of scanning electron microscope image contours for optical proximity correction modeling purposes
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Alignment and averaging of scanning electron microscope image contours for optical proximity correction modeling purposes
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Date
2010
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
De Bisschop, Peter
;
Van de Kerkhove, Jeroen
Journal
Journal of Micro/Nanolithography MEMS and MOEMS
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1905
since deposited on 2021-10-18
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Acq. date: 2025-12-11
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Metrics
Views
1905
since deposited on 2021-10-18
1
last month
Acq. date: 2025-12-11
Citations