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Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV
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Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV
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Date
2024-04-01
Journal article
https://doi.org/10.1063/5.0203648
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
von Laffert, Valentin
;
Sajjadian, Faegheh
;
Richter, Robert
;
van Setten, Michiel
;
Holzmeier, Fabian
Journal
The Journal of Chemical Physics
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573
since deposited on 2024-04-02
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Acq. date: 2026-01-07
Citations
Metrics
Views
573
since deposited on 2024-04-02
14
last month
7
last week
Acq. date: 2026-01-07
Citations