Publication:

Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV

Date

2024-04-01
Journal article
https://doi.org/10.1063/5.0203648
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dc.contributor.authorvon Laffert, Valentin
dc.contributor.authorSajjadian, Faegheh
dc.contributor.authorRichter, Robert
dc.contributor.authorvan Setten, Michiel
dc.contributor.authorHolzmeier, Fabian
dc.contributor.imecauthorvon Laffert, Valentin
dc.contributor.imecauthorSajjadian, Faegheh
dc.contributor.imecauthorvan Setten, Michiel
dc.contributor.imecauthorHolzmeier, Fabian
dc.contributor.orcidext0000-0001-8585-626X
dc.contributor.orcidimec0000-0001-8585-626X
dc.contributor.orcidimecvan Setten, Michiel::0000-0003-0557-5260
dc.contributor.orcidimecHolzmeier, Fabian::0000-0001-8749-5330
dc.contributor.orcidimec0000-0001-8585-626X
dc.date.accessioned2024-04-02T15:50:18Z
dc.date.available2024-04-02T15:50:18Z
dc.date.issued2024-04-01
dc.identifier.doi10.1063/5.0203648
dc.identifier.issn0021-9606
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/43763
dc.source.beginpage134303
dc.source.issue13
dc.source.journalThe Journal of Chemical Physics
dc.source.numberofpages8
dc.source.volume160
dc.subject.disciplinePhysical chemistry
dc.subject.keywordsEUV lithography
dc.subject.keywordsphotoacid generator
dc.subject.keywordsphotoionization
dc.subject.keywordssynchrotron
dc.subject.keywordsphotoelectron photoion coincidence
dc.title

Dissociative photoionization of phenyl triflate, a photoacid generator for photolithography, at 92 eV

dc.typeJournal article
dspace.entity.typePublication
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