Publication:

Plasma Charging Damage in HK-First and HK-Last RMG NMOS Devices

Date

2021

Journal article

https://doi.org/10.1109/TDMR.2021.3073473

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Author(s)

Hiblot, Gaspard

;

Parihar, Narendra

;

Dupuy, Emmanuel

;

Mannaert, Geert

;

Baudot, Sylvain

;

;

;

Vandooren, Anne

;

De Heyn, Vincent

;

Mercha, Abdelkarim

Journal

IEEE TRANSACTIONS ON DEVICE AND MATERIALS RELIABILITY

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1874 since deposited on 2022-02-22

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Acq. date: 2026-05-16