Publication:
EPE analysis of sub-N10 BEOL structures with Coventor's SEMulator3D
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1954 since deposited on 2021-10-24
1last month
Acq. date: 2026-01-09
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Metrics
Views
1954 since deposited on 2021-10-24
1last month
Acq. date: 2026-01-09
Citations