Publication:
EPE analysis of sub-N10 BEOL structures with Coventor's SEMulator3D
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1956 since deposited on 2021-10-24
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Acq. date: 2026-04-05
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Views
1956 since deposited on 2021-10-24
1last month
1last week
Acq. date: 2026-04-05
Citations