Publication:
Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platform
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1912 since deposited on 2021-10-20
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Acq. date: 2026-03-17
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Statistics
Views
1912 since deposited on 2021-10-20
4last month
4last week
Acq. date: 2026-03-17
Citations