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Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platform

Date

2012
Proceedings Paper
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dc.contributor.authorAl-Moghazy, Mohamed
dc.contributor.authorRottenberg, Xavier
dc.contributor.authorErismis, Mehmet Akif
dc.contributor.authorEl-Gamal, Hassan
dc.contributor.authorTilmans, Harrie
dc.contributor.imecauthorRottenberg, Xavier
dc.contributor.imecauthorTilmans, Harrie
dc.contributor.orcidimecTilmans, Harrie::0000-0003-4240-4962
dc.date.accessioned2021-10-20T10:01:30Z
dc.date.available2021-10-20T10:01:30Z
dc.date.issued2012
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/20281
dc.source.beginpage344
dc.source.conferenceProceedings of the 2nd Saudi international Nanotechnology Conference - 2SINC
dc.source.conferencedate11/11/2012
dc.source.conferencelocationRiyadh Saudi Arabia
dc.source.endpage347
dc.title

Design of a capacitive pressure sensor with uniform thickness diaphragm based on imec's SiGe-MEMS platform

dc.typeProceedings paper
dspace.entity.typePublication
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