Publication:
Contribution of fast and slow states to negative bias temperature instabilities in Hf(x)Si(1-x)ON/TaN based pMOSFETs
Date
| dc.contributor.author | Aoulaiche, Marc | |
| dc.contributor.author | Houssa, Michel | |
| dc.contributor.author | Degraeve, Robin | |
| dc.contributor.author | Groeseneken, Guido | |
| dc.contributor.author | De Gendt, Stefan | |
| dc.contributor.author | Heyns, Marc | |
| dc.contributor.imecauthor | Houssa, Michel | |
| dc.contributor.imecauthor | Degraeve, Robin | |
| dc.contributor.imecauthor | Groeseneken, Guido | |
| dc.contributor.imecauthor | De Gendt, Stefan | |
| dc.contributor.imecauthor | Heyns, Marc | |
| dc.contributor.orcidimec | Houssa, Michel::0000-0003-1844-3515 | |
| dc.contributor.orcidimec | De Gendt, Stefan::0000-0003-3775-3578 | |
| dc.date.accessioned | 2021-10-16T00:42:47Z | |
| dc.date.available | 2021-10-16T00:42:47Z | |
| dc.date.issued | 2005-06 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/10019 | |
| dc.source.beginpage | 134 | |
| dc.source.endpage | 137 | |
| dc.source.journal | Microelectronic Engineering | |
| dc.source.volume | 80 | |
| dc.title | Contribution of fast and slow states to negative bias temperature instabilities in Hf(x)Si(1-x)ON/TaN based pMOSFETs | |
| dc.type | Journal article | |
| dspace.entity.type | Publication | |
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