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Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration
Publication:
Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration
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Date
2024
Proceedings Paper
https://doi.org/10.1109/3DIC63395.2024.10830250
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Hiro, Akito
;
Leech, Damien
;
Schoofs, Geert
;
Slabbekoorn, John
;
Phommahaxay, Alain
;
Kennes, Koen
;
Beyer, Gerald
;
Beyne, Eric
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N/A
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119
since deposited on 2025-06-21
1
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Acq. date: 2025-12-15
Citations
Metrics
Views
119
since deposited on 2025-06-21
1
last month
Acq. date: 2025-12-15
Citations