Publication:
Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration
| dc.contributor.author | Hiro, Akito | |
| dc.contributor.author | Leech, Damien | |
| dc.contributor.author | Schoofs, Geert | |
| dc.contributor.author | Slabbekoorn, John | |
| dc.contributor.author | Phommahaxay, Alain | |
| dc.contributor.author | Kennes, Koen | |
| dc.contributor.author | Beyer, Gerald | |
| dc.contributor.author | Beyne, Eric | |
| dc.contributor.imecauthor | Hiro, Akito | |
| dc.contributor.imecauthor | Schoofs, Geert | |
| dc.contributor.imecauthor | Slabbekoorn, John | |
| dc.contributor.imecauthor | Phommahaxay, Alain | |
| dc.contributor.imecauthor | Kennes, Koen | |
| dc.contributor.imecauthor | Beyer, Gerald | |
| dc.contributor.imecauthor | Beyne, Eric | |
| dc.contributor.imecauthor | Leech, Damien | |
| dc.contributor.orcidimec | Hiro, Akito::0009-0007-2262-4921 | |
| dc.contributor.orcidimec | Slabbekoorn, John::0000-0002-6098-8618 | |
| dc.contributor.orcidimec | Phommahaxay, Alain::0000-0001-8672-2386 | |
| dc.contributor.orcidimec | Kennes, Koen::0000-0002-5987-2167 | |
| dc.contributor.orcidimec | Beyer, Gerald::0009-0001-0376-866X | |
| dc.contributor.orcidimec | Beyne, Eric::0000-0002-3096-050X | |
| dc.contributor.orcidimec | Leech, Damien::0000-0002-7202-5392 | |
| dc.date.accessioned | 2025-06-30T11:53:57Z | |
| dc.date.available | 2025-06-21T03:56:16Z | |
| dc.date.available | 2025-06-30T11:53:57Z | |
| dc.date.issued | 2024 | |
| dc.identifier.doi | 10.1109/3DIC63395.2024.10830250 | |
| dc.identifier.eisbn | 979-8-3315-1650-5 | |
| dc.identifier.isbn | 979-8-3315-1651-2 | |
| dc.identifier.issn | 2164-0157 | |
| dc.identifier.uri | https://imec-publications.be/handle/20.500.12860/45820 | |
| dc.publisher | IEEE | |
| dc.source.conference | 2024 International 3D Systems Integration Conference | |
| dc.source.conferencedate | SEP 25-27, 2024 | |
| dc.source.conferencelocation | Sendai | |
| dc.source.journal | N/A | |
| dc.source.numberofpages | 5 | |
| dc.title | Clean Dicing: An Alternative Blade Dicing Technique for Minimising Particles in 3D Heterogeneous Integration | |
| dc.type | Proceedings paper | |
| dspace.entity.type | Publication | |
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