SWIR InP-on-silicon tunable laser based on micro-transfer printing

Abstract

We demonstrate for the first time an InP-on-silicon laser with a tuning range from 1652 nm to 1706 nm realized using micro-transfer printing (μTP) technology. The laser achieves an output power of 1 mW. The laser cavities are fabricated in imec’s silicon photonics (SiPh) pilot line on 200 mm Silicon-on-Insulator (SOI) wafers with micro-transfer printed III-V gain chips.